Gigaphoton Ships Latest ArF Excimer Laser GT65A

22-Feb-2018 Intellasia | BusinessWire | 11:00 PM Print This Post

Improved downtime of lithography light sources by up to
50%, contributing significantly to increase the availability of
lithography equipment
Responding to growing demand for

OYAMA, Japan–(BUSINESS WIRE)–In January, Gigaphoton
(Head office: Oyama City, Tochigi Prefecture. President & CEO:
Katsumi Uranaka), a major manufacturer of lithography light sources,
announced the shipment of an ArF Excimer Laser for advanced immersion
exposure (lithography) devices, the “GT65A” Unit 1, as a new product
that meets the growing demand for semiconductors in recent years. The
new technology of the GT65A significantly contributes to the rise in
productivity of lithography equipment by providing stable operation of
the laser and improvement of process margins.

The GT65A will also deliver a 50% reduction in service downtime. This
key feature is realized by increasing chamber lifetime by 30% as well as
improving maintenance efficiency through the utilization of extensive
service data expertise acquired through many years of successful service
In addition, the stabilization technology “eMPL Solid”
and the control function “hMPL,” which form the spectrum control
function, enable the improvement of CD uniformity as well as expanding
process latitude.
Furthermore, the GT65A has successfully
eliminated the need to use helium gas. Due to this, we are able to
contribute to enhancing customers’ sustainability and CSR activities by
not only reducing environmental impact, but also by greatly reducing
risks associated with future helium gas supply deficits and price
Katsumi Uranaka, President & CEO of Gigaphoton
commented, “With the boom in recent years of the semiconductor market,
improving the availability of lithography equipment is an important
issue for each manufacturer. With the new technology in line with our
new roadmap ‘RAM Enhancement,’ we have further strengthened and improved
the Reliability, Availability and Maintainability of lithography light
sources, contributing to the semiconductor manufacturing industry.”

news releases on the GT65A can be found here.

news releases on RAM Enhancement can be found here.

news releases on helium free can be found here.

About Gigaphoton
Since it was founded in 2000, Gigaphoton has
delivered valuable solutions to semiconductor manufacturers throughout
the world as a laser supplier. In every stage from R&D to manufacture,
sales, and maintenance services, Gigaphoton is committed to providing
world-class support delivered from the perspective of everyday users.
For more information please visit


Media contact:
Gigaphoton Inc
Katsutomo Terashima,
Corporate Planning Division
[email protected]


Category: BusinessWire, PRAsia

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